System Level Model of micromirror cell in VHDL-AMS generated by ANSYS ROM Tool

The goal of this project is to popularize of Mode Superposition based Reduced Order Modeling technique for MEMS simulations.

Tutorial:

Kolchuzhin, Vladimir and Mehner, Jan (2015, June 30). System level modeling of the micromirror cell. Zenodo. 10.5281/zenodo.19153

Geometric model:

• 2D layout of the micromiror cell in an SVG format
• The CAD geometry of the micromiror cell in an IGES format

Simplorer model:

• micromirror.vhd
• micromirror_mod.dll

Cloud-based system simulator PartQuest Explore:

https://explore.partquest.com/live-embed-design/324074 work in progress

Simulink Model:

Simulink model of the micromirror cell:

• micromirror_ini.m
• sene.m
• cap12.m
• cap13.m
• cap23.m
• micromirror.mdl (in progress)

https://github.com/Kolchuzhin/micromirror_cell_in_VHDL-AMS/blob/master/Simulink_model/readme.md

hAMSter model:

The vhd-files have been compiled with hAMSter simulation system Version 2.0:

• variant 1: "Original Model" with comments + testbench.vhd;
• variant 2: micromirror.vhd (single file w/o packages);
• variant 3: micromirror.vhd (w/o SIGNAL) in progress;

Testbench:

• Solver parameters: Euler solver, time=1.5m, step=0.5 us
• Load options:
  • use_pass=0 => external modal forces, uN; fm1_ext=km_1*q1_ext, => q1_ext=1.0 (mechanical test)
  • use_pass=1 => calculation of voltage displacement functions up to pull-in: voltage sweep
  • use_pass=2 => calculation of voltage displacement functions at multiple load steps
  • use_pass=3 => calculation of displacements at acting element loads
  • use_pass=4 => (prestressed) harmonic analysis -> chirp for harmonic response; + DFT (external)
  • use_pass=5 => nonlinear transient analysis

Original Model:

Original Model of micromirror cell generated by ANSYS ROM Tool:

• initial.vhd
• ca12_ams_130.vhd
• ca13_ams_130.vhd
• ca23_ams_130.vhd
• s_ams_130.vhd
• transducer.vhd